Rice University

Shared Equipment Authority

Cleanroom Facilities

Nanofab Characterization Room: Ellipsometer (Horiba)

 

The ellipsometers are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.

This Horiba UVISEL spectroscopic ellipsometer, accommodates the spectrum from UV to near-IR, and can support measurements of film thickness and optical properties for a variety of tranparent materials. 

With sufficient knowledge of film properties from other forms of measurement, the curve-fitting software can also be used to determine approximate material compositions of films.