Rice University

Shared Equipment Authority

Cleanroom Facilities

Nanofab Clean Room: Plasma-Enhanced Chemical Vapor Deposition System (PECVD)

THIS INSTRUMENT IS NOW SCHEDULED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/

The Trion Orion II Load Lock is a Plasma Enhanced Chemical Vapor Deposition (PEVCD) system. The system has a Vacuum Load Lock and a Reactor design for producing low stress films using low power levels. Typical film growths are Oxide, Nitride, Oxynitride and etc