Rice University

Shared Equipment Authority


Microscope: JEOL 6500F Scanning Electron Microscope

for compositional and topographical imaging. The 6500F has a high speed electrostatic beam blanker and is configured for electron beam lithography via the Nabity NPGS system. Lithography resolution is approximately 20 nm.

Schedule rules:  

1. Users may only sign up for time starting at 10:00 am, up to two weeks in advance.  Weekend time will be available starting on the Friday two weeks before.