The ellipsometers are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.
This compact thin film analyzer from Filmetrics features easy-to-use software (currently hosted on the ALDS control computer), and a fiber-coupled probe to facilitate robust alignment normal to the sample. It measures the spectrum from UV to near-IR.
RESERVATIONS FOR THIS INSTRUMENT ARE NOW LOGGED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/
This Cambridge Ultratech Savannah 200 system can support a variety of ALD processes with a robust software interface and up to 5 modular precursor sources.
Currently supported processes include: Al2O3, HfO2, TiO2.