(The posted image needs updating; it shows a now-defunct CEE-100 spinner and excludes the Laurell Tech spinners.)
The spinners are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.
Two Laurell Tech WS-650 spinners are equipped with integral 1.75 inch vacuum chucks, suitable for up to 4-inch wafers. Additionally, small dies and pieces can be accommodated with chucks suitable for pieces down to 1 cm and several mm squares.
Also: an older Headway Research spinner continues to serve some specific user applications.
The ellipsometers are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.
This Horiba UVISEL spectroscopic ellipsometer, accommodates the spectrum from UV to near-IR, and can support measurements of film thickness and optical properties for a variety of tranparent materials.
With sufficient knowledge of film properties from other forms of measurement, the curve-fitting software can also be used to determine approximate material compositions of films.