Rice University

Shared Equipment Authority

Nanofabrication Cleanroom

Nanofab Clean Room: Spin Coaters (Cleanroom)

(The posted image needs updating; it shows a now-defunct CEE-100 spinner and excludes the Laurell Tech spinners.)

The spinners are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.

Two Laurell Tech WS-650 spinners are equipped with integral 1.75 inch vacuum chucks, suitable for up to 4-inch wafers. Additionally, small dies and pieces can be accommodated with chucks suitable for pieces down to 1 cm and several mm squares. 

Also: an older Headway Research spinner continues to serve some specific user applications.

Nanofab Characterization Room: Ellipsometer (Horiba)

 

The ellipsometers are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.

This Horiba UVISEL spectroscopic ellipsometer, accommodates the spectrum from UV to near-IR, and can support measurements of film thickness and optical properties for a variety of tranparent materials. 

With sufficient knowledge of film properties from other forms of measurement, the curve-fitting software can also be used to determine approximate material compositions of films.