Rice University

Shared Equipment Authority

Nanofabrication Cleanroom

Nanofab Clean Room: E-beam Evaporator

THIS INSTRUMENT IS NOW SCHEDULED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/

This instrument is used for thin film deposition of materials, primarily metals, along with a few select oxides and semiconductors. It features both a 10kW e-beam primary source and a supplmentary thermal source. Film thicknesses of several nm to a few hundred nm are possible with this instrument. A brief list of pre-approved materials for evaporation is given here: