Rice University

Shared Equipment Authority

Nanofab Clean Room: Critical Point Dryer (CPD)

Location: 
Nanofabrication Cleanroom (Abercrombie A137)

THIS INSTRUMENT IS NOW SCHEDULED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/


This instrument is not for biological sample preparation; it is reserved exclusively for the drying substrates and devices related to MEMS, NEMS, and nanomaterials research. Also: it is designed only for critical point drying using liquid CO2, not for any coating, wicking, or dissolving types of processes. 
Samples to be dried should be prepared in an alcohol solvent (propanol, ethanol, or methanol), and the ethanol required for a CPD process run is provided by the SEA for use with this instrument.

Smooth operation and precise control during a largely automated operational sequence are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" wafers or 10mm square die per process run. There is an additional holder for smaller samples; it can hold up to twelve pieces no larger than ~5 mm in diameter and height.

Notifications: 
This is a closed group. Only a group administrator can add you.
This is a closed group. Only a group administrator can add you.
Prime Start time: 
9 AM
Prime End time: 
5 PM
Use Prime hours: 
No
Max Weekly Hours: 
0
Max Daily Hours: 
0
Training Contact: 
Tim Gilheart: gilheart-at-rice.edu or 713-348-3159
Rice U Fee: 
$25/use
Non-Commercial / Academic Fee: 
$40/use
Corporate / Commercial Fee: 
$125/use
Maintenance: