Rice University

Shared Equipment Authority

Microscope: FEI Helios SEM/FIB

Brockman B-05

The FEI Helios NanoLab 660 DualBeam system integrates advanced scanning electron microscope (SEM) and focused ion beam (FIB) technologies with plasma cleaner, Gas Injection System (GIS) and the FEI EasyLift NanoManipulator. The FEI Helios NanoLab 660 DualBeam system makes milling, imaging, analysis, and sample preparation easy and efficient.

 FIB/SEM capabilities:        

  • Focused ion beam (FIB), 0.5-30 kV for fast cutting and efficient polishing      
  • Electron beam tuneable from 20 V- 30 kV  
  • Sub-nm resolution SEM from 0.5 kV to 30 kV       
  • Plasma cleaner in chamber      
  • Gas Injection System (GIS) for deposition of W, C, Pt       
  • FEI EasyLift NanoManipulator       
  • SE and 2 BSE detectors       
  • In-situ, automated creation of TEM lamella       
  • AutoSlice and View 3D reconstructions       
  • Precise marching complex micro- and nanoscale devices       
  • Circuit editing at nanoscale 


Training Contact: 

To begin training, please complete this form and send to both Prof. Emilie Ringe (er12@rice.edu) and Dr. Hua Guo (hua.guo@rice.edu)

More information can be found on the EMC website.


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Training Contact: 
Hua Guo, hg23@rice.edu
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