for compositional and topographical imaging. The 6500F has a high speed electrostatic beam blanker and is configured for electron beam lithography via the Nabity NPGS system. Lithography resolution is approximately 20 nm.
1. Users may only sign up for time starting at 10:00 am, up to two weeks in advance. Weekend time will be available starting on the Friday two weeks before.
2. Users may not reserve more than 10 total hours per week, running Sunday through Saturday, on each SEM.
3.Users may not reserve more than 4 prime time hours per day on each SEM.
4.Appointments made within 48 hours of their use do not count against these totals.