The ellipsometers are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.
This compact thin film analyzer from Filmetrics features easy-to-use software (currently hosted on the ALDS control computer), and a fiber-coupled probe to facilitate robust alignment normal to the sample. It measures the spectrum from UV to near-IR.
In addition to the standard probe with a spot size of several mm, a small-spot (< 1 mm) probe is available for applications that require it. Due to the delicate nature of the small-spot fiber, it is not left out for general use, so you must contact the cleanroom manager to receive access to it, should your measurements require it.