Rice University

Shared Equipment Authority

Nanofab Clean Room: Plasma Cleaner

Location: 
Nanofabrication Cleanroom (Abercrombie A137)

USAGE OF THIS INSTRUMENT IS NOW LOGGED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/

The plasma cleaner not reservable; it is a walk-up tool. 

This rebuilt SuperPlasmod 300 features a 300 W power supply, oxygen and argon process gases, and auto-tuning of the matching network.

In addition to plasma cleaning applications, it sees some use as an etching tool for processes where the anisotropy of an RIE process would be undesirable.

Notifications: 
This is a closed group. Only a group administrator can add you.
This is a closed group. Only a group administrator can add you.
Use Prime hours: 
No
Max Weekly Hours: 
168
Max Daily Hours: 
24
Training Contact: 
Tim Gilheart (gilheart@rice.edu), Cleanroom ManagerTraining may also be conducted by a veteran user, with permission from the cleanroom manager.
Rice U Fee: 
$8/use
Non-Commercial / Academic Fee: 
$12.50/use
Corporate / Commercial Fee: 
$40/use
Maintenance: