Rice University

Shared Equipment Authority

Nanofab Clean Room: Plasma-Enhanced Chemical Vapor Deposition System (PECVD)

Location: 
Nanofabrication Cleanroom (Abercrombie A137)

THIS INSTRUMENT IS NOW SCHEDULED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/

The Trion Orion II Load Lock is a Plasma Enhanced Chemical Vapor Deposition (PEVCD) system. The system has a Vacuum Load Lock and a Reactor design for producing low stress films using low power levels. Typical film growths are Oxide, Nitride, Oxynitride and etc

Notifications: 
This is a closed group. Only a group administrator can add you.
This is a closed group. Only a group administrator can add you.
Prime Start time: 
9 AM
Prime End time: 
5 PM
Use Prime hours: 
No
Max Weekly Hours: 
0
Max Daily Hours: 
0
Training Contact: 
Please contact Tim Gilheart (gilheart@rice.edu) for training. 
Rice U Fee: 
$25/depostion
Non-Commercial / Academic Fee: 
$39.25/deposition
Corporate / Commercial Fee: 
$125/deposition
Maintenance: