Rice University

Shared Equipment Authority

Nanofab Clearn Room: Atomic Layer Deposition System (ALDS)

Location: 
Nanofabrication Cleanroom (Abercrombie A137)

RESERVATIONS FOR THIS INSTRUMENT ARE NOW LOGGED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/

This Cambridge Ultratech Savannah 200 system can support a variety of ALD processes with a robust software interface and up to 5 modular precursor sources.

Currently supported processes include: Al2O3, HfO2, TiO2.

Additional processes will be considered based on demand, and users may wish to consider providing their own precursor for very specific applications. Please discuss any needed processes not listed with the cleanroom manager.

Notifications: 
This is a closed group. Only a group administrator can add you.
This is a closed group. Only a group administrator can add you.
Use Prime hours: 
No
Max Weekly Hours: 
0
Max Daily Hours: 
0
Training Contact: 
Tim Gilheart (gilheart@rice.edu), Cleanroom Manager. Currently, training is being facilitated by veteran users, with permission from the cleanroom manager. Contact Tim to make arrangements to learn ALDS operations from veteran users. 
Rice U Fee: 
$20/use
Non-Commercial / Academic Fee: 
$31.50/use
Corporate / Commercial Fee: 
$100/use
Maintenance: