SEA supports and provides state-of-the-art research equipment capabilities for Rice University and the extended Rice community.
We provide sophisticated research equipment and facilities to all members of the Rice University community, as well as support and open instrumentation usage to outside companies, nano/bio/enviro start-ups and other universities upon availability.
We support more than 65 instruments.
SEA offers training and support for all of our state-of-the-art research equipment.
Cutting thin semiconductor, glass, and quartz materials
Precision placement and bonding with controlled heating
Conformal coating with inert biocompatible polymer
Stylus-based surface profiling (submicron to millimeter)
Machine acrylic and non-metallic materials
Polishing wafers, chips, dies, and other pieces
Ultrasonic wedge bonding with fine gold wire
High resolution 2D and 3D printing
Thermal, conformal deposition of oxides
Supercritical drying of MEMS devices and materials
E-beam evaporation of metals, magnetics, dielectrics
Optical thin film characterization
Thermal evaporation of metals (primarily Ag, Al)
Contact photolithography; micron-scale resolution
Variable power (<300 W) oxygen and/or argon plasmas
Silicon oxide, oxynitride, and nitride capable
Optical thin film thickness measurement
Photoresists, PDMS, and spin-on materials