Thermal evaporation of metals (primarily Ag, Al)
THIS INSTRUMENT IS NOW SCHEDULED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/
The small HEX evaporator is well-suited to some metal deposition needs, especially those requiring better contamination control. It features convenient software controls and a small chamber size that efficiently achieves deposition-quality vacuum with a diaphragm pump backing a turbopump.
This instrument can accommodate various metal depositon processes using two single-pocket e-beam sources and one thermal source. Several metals are provided for general use (Ag, Al, and Ti, with more to come); they have dedicated crucibles also provided. More precious materials are the responsibility of the user.
A smaller 3kW power supply limits this tool to lower melting point materials, and we are restricting it to the following subset of allowed materials (metals only) to better support processes particularly sensitive to contamination:
Ag, Al, Au, Ca, Cu, Pd, Ti
Any other materials must be approved by the cleanroom manager.