Variable power (<300 W) oxygen and/or argon plasmas
USAGE OF THIS INSTRUMENT IS NOW LOGGED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/
The plasma cleaner not reservable; it is a walk-up tool.
This rebuilt SuperPlasmod 300 features a 300 W power supply, oxygen and argon process gases, and auto-tuning of the matching network.
In addition to plasma cleaning applications, it sees some use as an etching tool for processes where the anisotropy of an RIE process would be undesirable.