Photoresists, PDMS, and spin-on materials
(The posted image needs updating; it shows a now-defunct CEE-100 spinner and excludes the Laurell Tech spinners.)
The spinners are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.
Two Laurell Tech WS-650 spinners are equipped with integral 1.75 inch vacuum chucks, suitable for up to 4-inch wafers. Additionally, small dies and pieces can be accommodated with chucks suitable for pieces down to 1 cm and several mm squares.Ā
Also: an older Headway Research spinner continues to serve some specific user applications.
After working with these instruments, users must clean up residues from their processes with appropriate solvents (typically acetone or propanol), taking care to keep solvents away from the vacuum port. The best way to do this is to block the port with a die or wafer and hold it there securely with vacuum during the cleaning process.