Tim Gilheart (email@example.com), Cleanroom Manager. Currently, training is being facilitated by veteran users, with permission from the cleanroom manager. Contact Tim to make arrangements to learn ALDS operations from veteran users.
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This Cambridge Ultratech Savannah 200 system can support a variety of ALD processes with a robust software interface and up to 5 modular precursor sources.
Currently supported processes include: Al2O3, HfO2, TiO2.
Additional processes will be considered based on demand, and users may wish to consider providing their own precursor for very specific applications. Please discuss any needed processes not listed with the cleanroom manager.